| Arthur Sherman, Ph.D. | |||||||||||||||||||
| Capabilities | |||||||||||||||||||
| - Development of equipment and processes involving fluid dynamics, heat transfer, plasmas, and gas phase chemical reactions - For patent litigation Dr. Sherman can assist in: Infringement analysis, including claim interpretation Validity evaluation Tutorial preparation Deposition and trial expert witness testimony - Analysis of reactors for both Chemical Vapor Deposition and Atomic Layer Deposition - Evaluation of thin film deposition processes and equipment - Presentation of short courses in various areas of expertise, including internet available presentations. Atomic Layer |
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| Deposition course available at | |||||||||||||||||||
| Semizone | |||||||||||||||||||
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| Capabilities | |||||||||||||||||||
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| List of Patents | |||||||||||||||||||
| Career Highlights | |||||||||||||||||||
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