Anti-stick Electrostatic Chuck for a Low Pressure Environment US 5,426,558 6/20/95
Electrostatic Chuck, US 5,535,090 7/9/96
Electrostatic Chuck, US 5,867,359 2/2/99
Electrostatic Chuck, US 6,141,203 10/31/00
Sequential Chemical Vapor Deposition, US 5,916,365 6/29/99; US 6,342,277B1 1/29/02; US 6,616,986B2 9/9/03;
US 6,652,924B2 11/25/03
Atomic Layer Deposition using Multilayers, US 2004/0221798A1 11/11/04